PNANO - Programme National en Nanosciences et Nanotechnologies (PNANO)
Detection of sub-nanometre MEMS deflections with a metal semiconductor hybrid piezoresistor for biological, chemical and scanning probe applications – memsh
Project coordination
Alistair ROWE (Organisme de recherche)
The author of this summary is the project coordinator, who is responsible for the content of this summary. The ANR declines any responsibility as for its contents.
Partner
Help of the ANR 276,397 euros
Beginning and duration of the scientific project:
- 24 Months
