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Caractérisation et Test In-situ des Matériaux, Procédés et des Architectures (IMPACT)


Action : Equipements d'excellence


N° de convention : 10-EQPX-0033

Informations générales

  • Référence projet : 10-EQPX-0033
  • RST : Bernard PELISSIER
  • Etablissement Coordinateur : Université Grenoble Alpes
  • Région du projet : Auvergne-Rhône-Alpes
  • Discipline : 2 - SMI
  • Aide allouée : 4 997 120 €
  • Date de début du projet : 22/02/2011
  • Date de fin du projet : 31/12/2019
  • Mots clés : caractérisation de surface; quasi insitu;XPS;ellipsométrie;polarimétrie;raman;PL;300mm

Résumé du projet

The Equipex IMPACT project involves the set-up of an advanced characterization platform virtually connected to various process equipment for the development of microelectronic devices via specific 300mm and small samples compatible transfer modules (the quasi-insitu characterization concept) The purpose of such a platform around this concept is dual: For all processes dealing with materials sensitive to the atmosphere, the preservation of the vacuum chain between different process and characterization chambers allows fine understanding and development of industrial processes. The advanced and upstream nature of the characterization techniques implemented on the platform allows extensive studies in collaboration with our academic partners Funding for the project was used to build the different units of the IMPACT characterization platform itself. This includes three 300 mm and small samples compatible characterization chambers, equipped with vacuum transfer and loading systems. A parallel angle resolved XPS analysis chamber (with no sample tilt), under UHV A broad spectroscopic ellipsometry (UV-IR) analysis chamber, with a heating chuck (450 °) on which is added an IR polarimeter, all under vacuum A vacuum Raman and photoluminescence chamber. Moreover, a glove box under controlled atmosphere allows the cleavage and the transfer of small samples to a variety of other characterization systems on the site (ToF SIMS, Auger, AFM, ...)   Outside the IMPACT budget (LTM or LETI funding, depending on the case), several cleanroom process equipment (5 to date) have been connected to platform-compatible transfer interfaces.

(L'auteur de ce résumé est le coordinateur du projet, qui est responsable du contenu de ce résumé. L'ANR décline par conséquent toute responsabilité quant à son contenu.)